Product Introduction:
Model: PVD-0708
Size: Φ700×H800mm
Power: 25-65kw
Occupied area: 15-50m²
Arc source: 6-8sets
Coating film: Decorative Coating & Functional Coating
Advantage: High ionization rate, high deposition rate, stability to magnetron sputtering at low temperature, fine particles, simple operation, high yield etc.
Application:ceramic tile , mosaic tile , porcelain, marble
Color: gold, rose gold, champagne gold, black gold, coffee,silver, colorful, sapphire blue, black etc.
Coating:TiN,CrN,ZrN,TiCN,TiCrN,TiNC,TiALN and DLC
Remark:Specially tailored according to customers’ products and process requirements.
Technical Parameter
FOXIN-PVD Series Parameter |
Multi-Arc Ion Sputtering Coating Equipment Model(Diameter Less Than 1.2mm) |
Model |
PVD-0708 |
PVD-0809 |
PVD-0910 |
PVD-1012 |
PVD-1212 |
PVD-1215 |
Chamber(mm) |
D700×H800 |
D800×H900 |
D900×H1000 |
D1000×H1200 |
D1200×H1200 |
D1200×H1500 |
Film |
TiN,TiCN,ZrN,CrN,TiAIN,TiC |
structure |
Vertical door structure, with air pumping system and water cooling system |
Vacuum System |
Sustaining Pump + Mechanical Pump + Roots Pump + Diffusion Pump
or Molecule Pump |
Vacuum Measurement System |
1 set pirani, 1 set cold cathode, 1 set diaphragm gauge |
Power supply |
DC power, MF power, pulse power(bias power, arc power) |
Ultimate Pressure |
1.0- 6.0×10-4Pa, Non-loading cooling |
Arc Source |
6-8 set |
6-8 set |
8-12 set |
8-12 set |
10-14 set |
10-14 set |
200A-300A |
200A-300A |
200A-300A |
200A-300A |
200A-300A |
200A-300A |
Bias Power Supply |
20KW/1 set |
20KW/1 set |
20KW/1 set |
30KW/1 set |
30KW/1 set |
30KW/1 set |
Magnetron Power |
1-2 set |
1-2 set |
2-3 set |
2-3 set |
2-3 set |
2-3 set |
Temperature |
Normal temp - 300°C to 450°C - 600°C, controlled and adjusted(PID temp control) |
Gas |
Ar, N2, O2, C2H2,etc. |
Cooling |
Water cooling circulation, equip with industrial cooling tower or industrial water chiller(refrigerating machine)
or cryogenic system.(customers provide) |
Controlling |
Manual, half-auto, auto, touch screen operation, PLC or computer controlled |
Supply Index |
Air Pressure 0.5-0.8MPa, Water Temperature≤25°C,Water Pressure≥0.2MPa |
Total Power |
25~65KW |
45~85KW |
65~105KW |
85~115KW |
95~125KW |
100~130KW |
Output Frequency |
Voltage 380V,Frequency 50HZ/60HZ |
Occupation Space |
15~50m² |
15~50m² |
25~55m² |
25~55m² |
35~55m² |
35~55m² |
Remark |
customization |